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071220s2009 gw a b 001 0 eng |
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|a GBA823393
|2 bnb
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|a 014531619
|2 Uk
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| 020 |
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|a 9783527316984 (hbk.)
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| 020 |
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|a 3527316981 (hbk.)
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| 035 |
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|a (OCoLC)294998391
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| 040 |
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|a UKM
|b eng
|c UKM
|d BWX
|d TXA
|d YDXCP
|d DLC
|d DEBBG
|d OCL
|d FDA
|d BDX
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| 042 |
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|a ukblcatcopy
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| 049 |
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|a MNUA
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| 050 |
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4 |
|a TK7875
|b .S25 2009
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| 082 |
0 |
4 |
|a 621.381
|2 22
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| 084 |
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|a ZN 3750
|2 rvk
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| 245 |
0 |
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|a LIGA and its applications /
|c edited by Volker Saile [and others].
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| 260 |
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|a Weinheim :
|b Wiley-VCH ;
|a [Chichester] :
|b [John Wiley, distributor],
|c ©2009.
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| 300 |
|
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|a x, 479 pages :
|b illustrations ;
|c 25 cm.
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| 336 |
|
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|a text
|b txt
|2 rdacontent
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| 337 |
|
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|a unmediated
|b n
|2 rdamedia
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| 338 |
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|a volume
|b nc
|2 rdacarrier
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| 490 |
1 |
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|a Advanced micro & nanosystems ;
|v 7
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| 504 |
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|a Includes bibliographical references and index.
|
| 505 |
0 |
0 |
|g Introduction :
|t LIGA and its applications /
|r Volker Saile --
|t X-ray masks for LIGA microfabrication /
|r Yohannes Desta and Jost Goettert --
|t Innovative exposure techniques for 3D microfabrication /
|r Naoki Matsuzuka and Osamu Tabata --
|t Hot embossing of LIGA microstructures /
|r Mathias Heckele and Matthias Worgull --
|t Exposure and development simulation for deep x-ray LIGA /
|r Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, and Pascal Meyer --
|t Design for LIGA and safe manufacturing /
|r Ulrich Gengenbach, Ingo Sieber, and Ulrike Wallrabe --
|t Commercialization of LIGA /
|r Ron A. Lawes --
|t Polymer optics and optical MEMS /
|r Jürgen Mohr --
|t Refractive x-ray lenses produced by x-ray lithography /
|r Arndt Last --
|t RF applications /
|r Sven Achenbach and David M. Klymyshyn --
|t Evolution of the microspectrometer /
|r Reiner Wechsung, Sven Schönfelder, and Andreas Decker --
|t Actuator manufacture with LIGA processes /
|r Todd Christenson --
|t Development of microfluidic devices created via the LIGA process /
|r Masaya Kurokawa --
|t Application of inspection devices /
|r Yoshihiro Hirata --
|t The micro harmonic drive gear /
|r Reinhard Degen and Rolf Slatter --
|t Microinjection molding machines /
|r Christian Gornik --
|t Filled resist systems /
|r Thomas Hanemann, Claas Müller, and Michael Schulz --
|t Dramatic downsizing of soft x-ray synchrotron light source from compact to tabletop /
|r Hironari Yamada, Norio Toyosugi, Dorian Minkov, and Yoshiko Okazaki --
|t PTFE photo-fabrication by synchrotron radiation /
|r Takanori Katoh and Yanping Zhang.
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| 650 |
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0 |
|a Microelectromechanical systems
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| 650 |
|
0 |
|a Microtechnology
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| 650 |
0 |
7 |
|a LIGA-Verfahren.
|2 swd
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| 700 |
1 |
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|a Saile, Volker
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| 830 |
|
0 |
|a Advanced micro & nanosystems
|v 7.
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| 999 |
1 |
0 |
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| 999 |
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|l 9934668790001701
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|i University of Minnesota
|t BKS
|a TSCIGEN
|c TK7875 .S25 2009
|d LCC
|b 31951D027602341
|x BOOK
|y 23401503820001701
|p LOANABLE
|