LIGA and its applications /

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Bibliographic Details
Other Authors:	Saile, Volker
Format:	Book
Language:	English
Published:	Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], ©2009.
Series:	Advanced micro & nanosystems 7.
Subjects:	Microelectromechanical systems Microtechnology LIGA-Verfahren.

University of Minnesota

Holdings details from University of Minnesota
Call Number:	TK7875 .S25 2009