Electronics and structures for MEMS : 27-29 October 1999, Royal Pines Resort, Queensland, Australia /

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Bibliographic Details
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Institution of Radio and Electronics Engineers, Australia, Queensland. Government State Development, Griffith University Microelectronics Engineering Society
Other Authors:	Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1999.
Series:	Proceedings of SPIE--the International Society for Optical Engineering v. 3891.
Subjects:	Microelectromechanical systems > Congresses Smart structures > Congresses Microelectronics > Congresses

University of Minnesota

Holdings details from University of Minnesota
Call Number:	Quarto TK7875 .E43x 1999