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|a Materials science of microelectromechanical systems (MEMS) devices III :
|b symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. /
|c editors, Harold Kahn [and others].
|
| 260 |
|
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|a Warrendale, Pa. :
|b Materials Research Society,
|c ©2001.
|
| 300 |
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|a 1 volume (various pagings) :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
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| 337 |
|
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|a unmediated
|b n
|2 rdamedia
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| 338 |
|
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|a volume
|b nc
|2 rdacarrier
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| 490 |
1 |
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|a Materials Research Society symposium proceedings ;
|v v. 657
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| 504 |
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|a Includes bibliographical references and indexes.
|
| 650 |
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0 |
|a Microelectromechanical systems
|x Materials
|v Congresses.
|
| 700 |
1 |
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|a Kahn, Harold.
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| 773 |
1 |
8 |
|g no:657
|w 9963110690001701
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| 830 |
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|a Materials Research Society symposia proceedings ;
|v v. 657.
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|l 9951389170001701
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|m materials_science_of_microelectromechanical_systems_mems_devices_iiisy_____2001_______matera___________________________________________________________________________p
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