Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. /
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Other Authors: | |
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Format: | Book |
Language: | English |
Published: |
Warrendale, Pa. :
Materials Research Society,
©2001.
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Series: | Materials Research Society symposia proceedings ;
v. 657. |
Subjects: |