Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK /
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Durnten-Zurich, Switzerland :
Trans Tech Publications Ltd,
[2014]
|
| Series: | Diffusion and defect data. Solid state phenomena ;
v. 205/206. |
| Subjects: |