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Bibliographic Details
New Title:	IEEE International Conference on Micro Electro Mechanical Systems. Proceedings
Previous Title:	IEEE Workshop on Micro Electro Mechanical Systems. Proceedings
Corporate Authors:	IEEE International Conference on Micro Electro Mechanical Systems, IEEE Robotics and Automation Society, Micromachine Center (Japan)
Format:	Conference Proceeding
Language:	English
Published:	Piscataway, NJ : IEEE, 1999-2002.
Subjects:	Microelectromechanical systems > Congresses. Microelectromechanical systems Conference papers and proceedings

University of Minnesota

Holdings details from University of Minnesota
Call Number:	Quarto TK153 .M468