Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A. /
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| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. : Cambridge [England] :
Materials Research Society ; Cambridge University Press,
©2011.
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| Series: | Materials Research Society symposia proceedings ;
v. 1299. |
| Subjects: |