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100708s2010 paua b 101 0 eng d |
| 020 |
|
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|a 9781605111957
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| 020 |
|
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|a 1605111953
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| 035 |
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|a (OCoLC)646292092
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| 040 |
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|
|a LHL
|c LHL
|d YDXCP
|
| 090 |
|
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|a TK7875
|b .M37 2009
|
| 245 |
0 |
0 |
|a Microelectromechanical systems--materials and devices III :
|b symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. /
|c editors, Jörg Bagdahn [and others].
|
| 260 |
|
|
|a Warrendale, Pa. :
|b Materials Research Society,
|c ©2010.
|
| 300 |
|
|
|a ix, 211 pages :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Materials Research Society symposium proceedings,
|x 1946-4274 ;
|v v. 1222
|
| 500 |
|
|
|a "... papers presented at Symposium DD, 'Microelectromechanical Systems--Materials and Devices III,' held November 30-December 2 at the 2009 MRS Fall Meeting in Boston, Massachusetts"-- preface.
|
| 504 |
|
|
|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Materials
|v Congresses.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|v Congresses.
|
| 650 |
|
0 |
|a Thin films
|v Congresses.
|
| 650 |
|
0 |
|a Nanostructured materials
|v Congresses.
|
| 650 |
|
0 |
|a Silicon
|v Congresses
|
| 700 |
1 |
|
|a Bagdahn, Jörg.
|
| 710 |
2 |
|
|a Materials Research Society.
|b Meeting
|d (2009 :
|c Boston, Mass.)
|
| 711 |
2 |
|
|a Symposium DD, "Microelectromechanical Systems--Materials and Devices III"
|d (2009 :
|c Boston, Mass.)
|
| 773 |
1 |
8 |
|g no:1222
|w 9963110690001701
|
| 830 |
|
0 |
|a Materials Research Society symposia proceedings;
|v v. 1222.
|
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1 |
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|m microelectromechanical_systems_materials_and_devices_iiisymposium_held_____2010_______matera___________________________________________________________________________p
|