Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. /
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| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
©2010.
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| Series: | Materials Research Society symposia proceedings;
v. 1222. |
| Subjects: |