Enabling technology for MEMS and nanodevices /

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Bibliographic Details
Other Authors:	Baltes, H. (Henry)
Format:	Book
Language:	English
Published:	Weinheim : Wiley-VCH, ©2004.
Series:	Advanced micro & nanosystems v. 1.
Subjects:	Microelectromechanical systems Microelectronics Nanotechnology

University of Minnesota

Holdings details from University of Minnesota
Call Number:	TK7875 .E53 2004