Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
©2005.
|
| Edition: | 2nd ed. |
| Series: | Nano- and microscience, engineering, technology, and medicine series
8. |
| Subjects: |