Gettering and Defect Engineering in the Semiconductor Technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting, Garzau, German Democratic Republic, October 8 -13, 1989 /
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| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Brookfield, Vt. :
Sci-Tech Publications,
©1989.
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| Series: | Diffusion and defect data. Solid state phenomena ;
v. 6/7. |
| Subjects: |