Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A. /
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Corporate Author: | |
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Other Authors: | , , |
Format: | Book |
Language: | English |
Published: |
Pittsburgh, Pa. :
Materials Research Society,
©1995.
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Series: | Materials Research Society symposia proceedings ;
v. 363. |
Subjects: |