Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A. /
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| Corporate Author: | |
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| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh, Pa. :
Materials Research Society,
©1995.
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| Series: | Materials Research Society symposia proceedings ;
v. 363. |
| Subjects: |