Reliability of MEMS /

Saved in:

Bibliographic Details
Other Authors:	Tsuchiya, Toshiyuki, Tabata, Osamu, 1956-
Format:	Book
Language:	English
Published:	Weinheim : Wiley-VCH, ©2008.
Series:	Advanced micro & nanosystems v. 6.
Subjects:	Microelectromechanical systems > Reliability. Mikrosystemtechnik. Nanotechnologie.

University of Minnesota

Holdings details from University of Minnesota
Call Number:	TK7875 .R45 2008