MOEMS : micro-opto-electro-mechanical systems /

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Bibliographic Details
Other Authors:	Motamedi, M. Edward
Format:	Book
Language:	English
Published:	Bellingham, WA : SPIE Press, ©2005.
Subjects:	Microelectromechanical systems Optoelectronic devices Microfabrication

University of Minnesota

Holdings details from University of Minnesota
Call Number:	TK7875 .M56 2005