Foundations of MEMS /

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Bibliographic Details
Main Author:	Liu, Chang, Ph.D
Format:	Book
Language:	English
Published:	Upper Saddle River, N.J. : Prentice Hall, ©2012.
Edition:	2nd ed.
Subjects:	Microelectromechanical systems.

Minnesota State University, Mankato

Holdings details from Minnesota State University, Mankato
Call Number:	TK7875 .L48 2012