Photonic MEMS devices : design, fabrication and control.

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Bibliographic Details
Main Author:	Liu, Ai-Qun
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, ©2009.
Series:	Optical science and engineering (CRC Press) 136.
Subjects:	Microelectromechanical systems

University of Minnesota

Holdings details from University of Minnesota
Call Number:	Quarto TK7875 .L58 2008