Ion implantation : science and technology

Ion implantation : science and technology /

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Bibliographic Details
Other Authors:	Ziegler, J. F. (James F.)
Format:	Book
Language:	English
Published:	Boston : Academic Press, ©1988.
Edition:	2nd ed.
Subjects:	Ion implantation

University of Minnesota

Holdings details from University of Minnesota
Call Number:	QC702.7.I55 I59 1988