Role of boundary conditions in Monte Carlo simulation of MEMS devices /
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| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | Government Document Book |
| Language: | English |
| Published: |
Washington, D.C. : [Springfield, Va.] :
American Institute of Aeronautics and Astronautics : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor],
[1997]
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| Series: | NASA contractor report ;
NASA CR-205107. |
| Subjects: |