Fabrication of silicon microprobes for optical near-field applications /
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| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla. :
CRC Press,
©2002.
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| Subjects: |
| Physical Description: | 180 page : illustrations ; 25 cm |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0849311543 (alk. paper) |