Fabrication of silicon microprobes for optical near-field applications /

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Bibliographic Details
Main Author:	Minh, Phan Ngoc
Other Authors:	Takahito, Ono, Esashi, Masayoshi, 1949-
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, ©2002.
Subjects:	Micromachining Silicon Near-field microscopy Microprobe analysis

University of Minnesota

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Call Number:	TJ1191.5 .M5526 2002