Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA /

Saved in:

Bibliographic Details
Corporate Author:	Society of Photo-Optical Instrumentation Engineers
Other Authors:	Descour, Michael R., Rantala, Juha
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©2001.
Series:	Proceedings of SPIE--the International Society for Optical Engineering v. 4284.
Subjects:	Microelectromechanical systems > Congresses Optoelectronic devices > Congresses Microelectronic packaging > Congresses

University of Minnesota

Holdings details from University of Minnesota
Call Number:	Quarto TK7875 .F86x 2001