Gettering defects in semiconductors /

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Bibliographic Details
Main Author:	Perevoshchikov, V. A. (Viktor Aleksandrovich)
Other Authors:	Skoupov, V. D. (Vladimir D.)
Format:	Book
Language:	English Russian
Published:	Berlin ; New York : Springer, ©2005.
Series:	Springer series in advanced microelectronics 19.
Subjects:	Semiconductors > Materials Getters

University of Minnesota

Holdings details from University of Minnesota
Call Number:	TK7871.85 .P4248 2005