Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of microfabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /
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| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, N.Y. :
American Society of Mechanical Engineers,
©1996.
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| Series: | DSC (Series)
vol. 59. |
| Subjects: |