Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems /

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Bibliographic Details
Main Author:	Vezzetti, Carol F.
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Varner, Ruth N., Potzick, James E.
Format:	Government Document Book
Language:	English
Published:	Gaithersburg, Md. : [Springfield, Va.] : U.S. Dept. of Commerce, National Institute of Standards and Technology ; [Order from National Technical Information Service], 1992.
Series:	Standard reference materials. NIST special publication 260-117.
Subjects:	Integrated circuits > Calibration > Standards. Microscopes > Calibration > Standards Optical measurements > Standards.

University of Minnesota

Holdings details from University of Minnesota
Call Number:	Mfiche C 13.10:260-117