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1
Journal of microelectromechanical systems.
New York, NY : Institute of Electrical and Electronics Engineers, 1992Subjects: “…Microelectromechanical systems Periodicals.…”
Format: Journal
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2
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering /
Boca Raton : CRC Press, 2001Table of Contents: “…Mathematical models and design of nano- and microelectromechanical systems --…”
Format: Book
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3
Dynamics of microelectromechanical systems /
New York : Springer, 2007Subjects: “…Microelectromechanical systems…”
Format: Book
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4
Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of microfabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /
New York, N.Y. : American Society of Mechanical Engineers, 1996Format: Conference Proceeding Book
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5
Microelectromechanical systems (MEMS) : presented at the ... International Mechanical Engineering Congress and Exhibition.
Format: Conference Proceeding
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6
Mechanics of microelectromechanical systems /
New York : Kluwer Academic, 2005Subjects: “…Microelectromechanical systems…”
Format: Book
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7
Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA /
Warrendale, Pa. : Materials Research Society, 2008Subjects: “…Microelectromechanical systems Materials Congresses.…”
Format: Conference Proceeding Book
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8
Handbook of silicon based MEMS materials and technologies
Amsterdam ; Boston : William Andrew/Elsevier, 2010Subjects: “…Microelectromechanical systems.…”
1st ed.
Format: Book
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9
MEMS : making micro machines
Mountain View, CA : Silicon Run Productions, 2009Subjects: “…Microelectromechanical systems.…”
Format: DVD
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10
Foundations of MEMS
Upper Saddle River, N.J. : Prentice Hall, 2012Subjects: “…Microelectromechanical systems.…”
2nd ed.
Format: Book
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11
Technical digest
Piscataway, NJ : IEEE, 1999Subjects: “…Microelectromechanical systems Congresses.…”
Format: Conference Proceeding
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12
Microengineering, MEMS, and interfacing : a practical guide
Boca Raton, FL : CRC/Taylor & Francis, 2006Subjects: “…Microelectromechanical systems…”
Format: Book
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13
An introduction to microelectromechanical systems engineering /
Boston ; London : Artech House, 2004Subjects: “…Microelectromechanical systems…”
2nd ed.
Format: Book
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14
Analysis and design principles of MEMS devices
Amsterdam ; Oxford : Elsevier, 2005Subjects: “…Microelectromechanical systems…”
Format: Book
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15
MEMS-based integrated navigation.
Boston : Artech House, 2010Subjects: “…Microelectromechanical systems…”
Format: Book
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16
Materials integration and processing development for microelectromechanical systems (MEMS) /
1996Subjects: “…Microelectromechanical systems…”
Format: Thesis Book
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17
Photonic MEMS devices : design, fabrication and control.
Boca Raton, Fla. : CRC Press, 2009Subjects: “…Microelectromechanical systems…”
Format: Book
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18
An introduction to microelectromechanical systems engineering /
Boston : Artech House, 2000Subjects: “…Microelectromechanical systems…”
Format: Book
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19
A guide to hands-on MEMS design and prototyping
Cambridge, UK ; New York : Cambridge University Press, 2011Subjects: “…Microelectromechanical systems…”
Format: Book
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20
Military applications of microelectromechanical systems /
Santa Monica, CA : Rand, 1993Subjects:Format: Book
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