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81
Electromechanical systems, electric machines, and applied mechatronics
Boca Raton : CRC Press, 2000Subjects:Format: Book
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82
MEMS and microsystems : design and manufacture
Boston : McGraw-Hill, 2002Subjects:Format: Book
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83
BioMEMS and smart nanostructures : 17-19 December 2001, Adelaide, Australia
Bellingham, Wash., USA : SPIE, 2001Subjects: “…Microelectromechanical systems Congresses…”
Format: Book
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84
Micro, nanosystems, and systems on chips : modeling, control, and estimation
London, UK : Hoboken, N.J. : ISTE ; Wiley, 2010Subjects: “…Microelectromechanical systems…”
Format: Book
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85
Microfabricated peristaltic fluid pump
1997Subjects:Format: Thesis Book
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86
MEMS and microsystems : design, manufacture, and nanoscale engineering
Hoboken, N.J. : John Wiley, 2008Subjects:
2nd ed.Format: Book
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87
Practical MEMS
Las Vegas, Nev. : Small Gear Pub., 2009Subjects: “…Microelectromechanical systems.…”
Format: Book
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88
Reconfigurable array antenna using Microelectromechanical Systems (MEMS) actuators /
[Cleveland, Ohio] : National Aeronautics and Space Administration, Glenn Research Center, 2001Subjects:Format: Government Document Conference Proceeding Book
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89
Materials science of microelectromechanical systems (MEMS) devices /
Warrendale, Pa. : Materials Research Society, 1999Subjects: “…Microelectromechanical systems Congresses.…”
Format: Book
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90
Mathematical analysis of partial differential equations modeling electrostatic MEMS
New York : Providence, R.I. : Courant Institute of Mathematical Sciences ; American Mathematical Society, 2010Subjects: “…Microelectromechanical systems Mathematical models.…”
Format: Book
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91
IUTAM Symposium on Flow Control and MEMS : proceedings of the IUTAM Symposium held at the Royal Geographic Society, 19-22 September 2006, hosted by Imperial College, London, Englan...
Dordrecht [Netherlands] : Springer, 2008Subjects:Format: Conference Proceeding Book
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92
Micro electro mechanical system design
Boca Raton : Taylor & Francis, 2005Subjects: “…Microelectromechanical systems Design and construction.…”
Format: Book
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93
Introduction to microfabrication
Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, 2004Subjects: “…Microelectromechanical systems…”
Format: Book
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94
CMOS-MEMS
Weinheim ; [Great Britain] : Wiley-VCH, 2005Subjects:Format: Book
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95
Optical microscanners and microspectrometers using thermal bimorph actuators
Boston : Kluwer Academic, 2002Subjects: “…Microelectromechanical systems…”
Format: Book
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96
Microsensors, MEMS, and smart devices
Chichester ; New York : Wiley, 2001Subjects: “…Microelectromechanical systems…”
Format: Book
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97
Micromachines as tools for nanotechnology
Berlin ; New York : Springer, 2003Subjects:Format: Book
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98
MEMS/MOEMS packaging : concepts, designs, materials, and processes
New York : McGraw-Hill, 2005Subjects:Format: Book
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99
LIGA and its applications
Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], 2009Subjects: “…Microelectromechanical systems…”
Format: Book
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100
JTEC panel on microelectromechanical systems in Japan : final report /
Baltimore, Md. : [Washington, D.C.] : [Springfield, Va.] : International Technology Research Institute, Loyola College in Maryland ; [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], 1994Subjects: “…Microelectromechanical systems Research Japan.…”
Format: Government Document Book
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