Showing 1 - 6 results of 6 for search '"Advanced micro & nanosystems"', query time: 0.13s Refine Results
  1. 1
    Micro process engineering : fundamentals, devices, fabrication, and applications

    Micro process engineering : fundamentals, devices, fabrication, and applications

    Weinheim : [Chichester] : Wiley-VCH ; [John Wiley [distributor]], 2006
    “…Advanced micro & nanosystems…”
    Format: Book


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  2. 2
    CMOS-MEMS

    CMOS-MEMS

    Weinheim ; [Great Britain] : Wiley-VCH, 2005
    “…Advanced micro & nanosystems…”
    Format: Book


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  3. 3
    Reliability of MEMS

    Reliability of MEMS

    Weinheim : Wiley-VCH, 2008
    “…Advanced micro & nanosystems…”
    Format: Book


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  4. 4
    Carbon nanotube devices : properties, modeling, integration and applications

    Carbon nanotube devices : properties, modeling, integration and applications

    Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], 2008
    “…Advanced micro & nanosystems…”
    Format: Book


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  5. 5
    Enabling technology for MEMS and nanodevices

    Enabling technology for MEMS and nanodevices

    Weinheim : Wiley-VCH, 2004
    “…Advanced micro & nanosystems…”
    Format: Book


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  6. 6
    LIGA and its applications

    LIGA and its applications

    Weinheim : [Chichester] : Wiley-VCH ; [John Wiley, distributor], 2009
    “…Advanced micro & nanosystems…”
    Format: Book


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