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  1. 1

    Introduction to microlithography

    Washington, DC : American Chemical Society, 1994
    2nd ed.
    Format: Book


  2. 2

    Electronic and photonic applications of polymers

    Washington, DC : American Chemical Society, 1988
    Format: Book


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  6. 6

    Silicon micromachining by Elwenspoek, M. (Miko), 1948-

    Cambridge [England] ; New York : Cambridge University Press, 1998
    Format: Book