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1
Introduction to microlithography
Washington, DC : American Chemical Society, 1994
2nd ed.Format: Book
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2
Electronic and photonic applications of polymers
Washington, DC : American Chemical Society, 1988Format: Book
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3
Working mechanisms and applications of scanning probe microscopes in nanolithography
Format: Thesis Book
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4
Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of...
Washington, D.C. : American Chemical Society, 1984Format: Book
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5
Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Mee...
Washington, D.C. : American Chemical Society, 1983Format: Book
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6
Silicon micromachining
Cambridge [England] ; New York : Cambridge University Press, 1998Format: Book
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