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|a (OCoLC)32027170
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| 037 |
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|a N 94-34076
|b NASA
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| 040 |
|
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|a GPO
|c GPO
|d DLC
|d MnU
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| 049 |
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|a [MF] MNUJ
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| 074 |
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|a 0830-H-14 (MF)
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| 086 |
0 |
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|a NAS 1.26:193946
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| 099 |
|
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|a NAS 1.26:193946
|
| 100 |
1 |
|
|a Williams, John R.
|
| 245 |
1 |
0 |
|a [Sputter process investigation] :
|b final technical report /
|c John R. Williams, Michael J. Bozack, and Albert T. Fromhold.
|
| 260 |
|
|
|a [Washington, DC] :
|b [National Aeronautics and Space Administration] ;
|a [Springfield, Va.] :
|b [National Technical Information Service, distributor],
|c [1994]
|
| 300 |
|
|
|a 1 volume.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a microform
|b h
|2 rdamedia
|
| 338 |
|
|
|a microfiche
|b he
|2 rdacarrier
|
| 490 |
1 |
|
|a NASA contractor report;
|v NASA CR-193946
|
| 500 |
|
|
|a Distributed to depository libraries in microfiche.
|
| 500 |
|
|
|a Shipping list no.: 94-0859-M.
|
| 533 |
|
|
|a Microfiche.
|b [Washington, D.C. :
|c National Aeronautics and Space Administration,
|d 1994]
|e 1 microfiche.
|
| 650 |
|
7 |
|a Ellipsometry.
|2 nasat
|
| 650 |
|
0 |
|a Optical measurements.
|
| 650 |
|
7 |
|a Optical reflection.
|2 nasat
|
| 650 |
|
7 |
|a Optical thickness.
|2 nasat
|
| 650 |
|
7 |
|a Phase shift.
|2 nasat
|
| 700 |
1 |
|
|a Bozack, Michael J.
|
| 700 |
1 |
|
|a Fromhold, A. T.
|
| 710 |
1 |
|
|a United States.
|b National Aeronautics and Space Administration
|
| 830 |
|
0 |
|a NASA contractor report ;
|v NASA CR-193946.
|
| 999 |
1 |
0 |
|i 1e757bd0-a4b1-4568-84aa-e9cf5ee4d0f5
|l 9942856500001701
|s US-MNU
|m sputter_process_investigationfinal_technical_report________________________1994_______natioa________________________________________williams__john_r___________________nas_1_26_193946p
|