[Sputter process investigation] : final technical report

[Sputter process investigation] : final technical report /

Saved in:
Bibliographic Details
Main Author: Williams, John R.
Corporate Author: United States. National Aeronautics and Space Administration
Other Authors: Bozack, Michael J., Fromhold, A. T.
Format: Government Document Book
Language:English
Published: [Washington, DC] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], [1994]
Series:NASA contractor report ; NASA CR-193946.
Subjects:
Ellipsometry.
Optical measurements.
Optical reflection.
Optical thickness.
Phase shift.
Description
Item Description:Distributed to depository libraries in microfiche.
Shipping list no.: 94-0859-M.
Physical Description:1 volume.

Similar Items