MEMS and NEMS : systems, devices, and structures

MEMS and NEMS : systems, devices, and structures /

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Bibliographic Details
Main Author:	Lyshevski, Sergey Edward
Format:	Book
Language:	English
Published:	Boca Raton, Fla. : CRC Press, ©2002.
Series:	Nano- and microscience, engineering, technology, and medicine series
Subjects:	Microelectromechanical systems. MEMS. Nanotechnologie.

Table of Contents:

1. Overview and Introduction
2. New Trends in Engineering and Science: Micro- and Nanoscale Systems
3. Fundamentals of MEMS Fabrication
4. Devising and Synthesis of MEMS and NEMS
5. Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures
6. Nanosystems, Quantum Mechanics, and Mathematical Models
7. Control of Microelectromechanical Systems
8. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided-Design of MEMS.