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|a Lyshevski, Sergey Edward.
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|a MEMS and NEMS :
|b systems, devices, and structures /
|c Sergey Edward Lyshevski.
|
| 260 |
|
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|a Boca Raton, Fla. :
|b CRC Press,
|c ©2002.
|
| 300 |
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|a 461 pages :
|b illustrations ;
|c 25 cm.
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| 336 |
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|a text
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| 490 |
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|a Nano- and microscience, engineering, technology, and medicine series
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| 504 |
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|a Includes bibliographical references and index.
|
| 505 |
0 |
0 |
|g 1.
|t Overview and Introduction --
|g 2.
|t New Trends in Engineering and Science: Micro- and Nanoscale Systems --
|g 3.
|t Fundamentals of MEMS Fabrication --
|g 4.
|t Devising and Synthesis of MEMS and NEMS --
|g 5.
|t Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures --
|g 6.
|t Nanosystems, Quantum Mechanics, and Mathematical Models --
|g 7.
|t Control of Microelectromechanical Systems --
|g 8.
|t Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided-Design of MEMS.
|
| 583 |
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