Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, USA /
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| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
©2003.
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| Series: | Materials Research Society symposia proceedings ;
v. 741. |
| Subjects: |