Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, USA

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, USA /

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Bibliographic Details
Corporate Authors: Materials Research Society, Symposium J, "Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines"
Other Authors: LaVan, David A.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, ©2003.
Series:Materials Research Society symposia proceedings ; v. 741.
Subjects:
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses
Description
Physical Description:xiii, 298 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558996788

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