Microoptics and nanooptics fabrication /

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Bibliographic Details
Other Authors: Kemme, Shanalyn A.
Format: Book
Language:English
Published: Boca Raton : CRC Press, ©2010.
Subjects:
Table of Contents:
  • Fabricating surface-relief diffractive optical elements / Shanalyn A. Kemme and Alvaro A. Cruz-Cabrera
  • Fabrication of microoptics with plasma etching techniques / Gregg T. Borek
  • Analog lithography with phase-grating masks / Jin Won Sung and Eric G. Johnson
  • Electron beam lithography for the nanofabrication of optical devices / Aaron Gin and Joel R. Wendt
  • Nanoimprint lithography and device applications / Jian (Jim) Wong
  • Design and fabrication of planar photonic crystals / Dennis W. Prather ... [et al.]
  • Fabrication of 3D crystals : molded tungsten approach / Paul J. Resnick and Ihab F. El-Kady.