Microelectronic materials and processes /

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Bibliographic Details
Corporate Authors:	North Atlantic Treaty Organization. Scientific Affairs Division, NATO Advanced Study Institute on Microelectronic Materials and Processes
Other Authors:	Levy, R. A., 1944-
Format:	Conference Proceeding Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic Publishers, ©1989.
Series:	NATO ASI series. Applied sciences no. 164.
Subjects:	Microelectronics > Materials > Congresses Integrated circuits > Very large scale integration > Design and construction > Congresses

University of Minnesota

Holdings details from University of Minnesota
Call Number:	TK7874 .M469 1989