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|a 0792301471
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|a 0792301544 (pbk.)
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|a (OCoLC)19123160
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| 040 |
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|d MnU
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| 050 |
0 |
0 |
|a TK7874
|b .M469 1989
|
| 082 |
0 |
|
|a 621.381/7
|2 19
|
| 245 |
0 |
0 |
|a Microelectronic materials and processes /
|c edited by R.A. Levy.
|
| 260 |
|
|
|a Dordrecht ;
|a Boston :
|b Kluwer Academic Publishers,
|c ©1989.
|
| 300 |
|
|
|a xiv, 985 pages :
|b illustrations ;
|c 25 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a NATO ASI series. Series E, Applied sciences ;
|v vol. 164
|
| 500 |
|
|
|a "Published in cooperation with NATO Scientific Affairs Division."
|
| 500 |
|
|
|a "Proceedings of the NATO Advanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986"--Title page verso.
|
| 504 |
|
|
|a Includes bibliographies and index.
|
| 650 |
|
0 |
|a Microelectronics
|x Materials
|v Congresses
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction
|v Congresses
|
| 700 |
1 |
|
|a Levy, R. A.,
|d 1944-
|
| 710 |
2 |
|
|a North Atlantic Treaty Organization.
|b Scientific Affairs Division
|
| 711 |
2 |
|
|a NATO Advanced Study Institute on Microelectronic Materials and Processes
|d (1986 :
|c Il Ciocco, Italy)
|
| 830 |
|
0 |
|a NATO ASI series.
|n Series E,
|p Applied sciences
|v no. 164.
|
| 999 |
1 |
0 |
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|
| 999 |
1 |
1 |
|l 9955388280001701
|s ISIL:US-MNU
|i University of Minnesota
|t BKS
|a TSCIGEN
|c TK7874 .M469 1989
|d LCC
|b 31951000980777B
|x BOOK
|y 23488284530001701
|p LOANABLE
|