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  1. 1

    Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

    Bellingham, Wash., USA : SPIE, 1999
    “…Institution of Radio and Electronics Engineers, Australia…”
    Format: Book


  2. 2

    Electronics and structures for MEMS : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

    Bellingham, Wash., USA : SPIE, 1999
    “…Institution of Radio and Electronics Engineers, Australia…”
    Format: Book