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Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Bellingham, Wash., USA : SPIE, 1999“…Institution of Radio and Electronics Engineers, Australia…”
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Electronics and structures for MEMS : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Bellingham, Wash., USA : SPIE, 1999“…Institution of Radio and Electronics Engineers, Australia…”
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