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    Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

    Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

    Warrendale, Pa. : Materials Research Society, 2010
    Other Authors: “…Bagdahn, Jörg…”
    Format: Conference Proceeding Book


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