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The materials science of microelectronics by Bachmann, Klaus J.
New York, N.Y. : VCH, 1995Call Number: Loading…
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The control of stoichiometry in epitaxial semiconductor structures : interfacial chemistry, property relations : a workshop review by Bachmann, Klaus J.
[Washington, D.C.] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], 1995Call Number: Loading…
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The control of purity and stoichiometry of compound semiconductors by high vapor pressure transport : final report on NASA grant NAGW-2865
[Washington, D.C.] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], 1995Other Authors: “…Bachmann, Klaus J.…”
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P-polarized reflectance spectroscopy : a high sensitive real-time monitoring technique to study surface kinetics under steady state epitaxial deposition conditions by Dietz, Nikolaus
[Washington, D.C.] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], 1995Other Authors: “…Bachmann, Klaus J.…”
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Related Subjects
Epitaxy
Semiconductors (Materials)
Stoichiometry
Controllability
Crystal growth
Crystal structure
Dielectric properties
Electric properties
Film thickness
Fine structure
Group 5A compounds
Impurities
Laser applications
Light amplifiers
Light scattering
Materiaalkunde
Materials
Micro-elektronica
Microelectronics
Mikroelektronik
Parametric amplifiers
Purity
Semiconductor devices
Semiconductors
Spectral reflectance
Spectrum analysis
Surface layers
Transport properties
Werkstoff